This electron gun column is designed to generate a very small spot in the nm range. It is also available as part of a complete scanning electron imaging package (SEM-package).

Key features

  • Beam size (min.) <85 nm at max energy and 12 mm working distance
  • Energy range 200 eV – 15 keV
  • Beam current (max.) 1 μA


  • Working Distance (WD) 10 mm – 50 mm
  • Optimum WD 12 mm nominal
  • Basic beam blanking (optional)
  • Beam blanking, external (optional)
  • Beam pulsing (optional)
  • Computer control (optional)
  • Magnetic shielding (optional)
  • Beam scanning (optional)
  • Microprocessor controlled beam current regulation (optional)
  • Remote control
Not all parameters can be reached simultaneously. Above specifications may change without notice.
Pictures / diagrams for reference only.