Ion sources manufactured by STAIB Instruments are compact, light weight, high performance instruments.

Key features

  • Type: UHV compatible douplasmatron
  • Energy range: 500 eV to 5 keV
  • Minimum beam diameter: 5 to 10 μm (dep. on energy and distance)
  • Working pressure (chamber): 6 x 10-8 – 1 x 10-5 mbar
  • Working pressure (ion gun): 1 x 10-4 – 1 x 10-3 mbar
  • Working distance: 10 – 125 mm
  • Deflection in X, Y
  • Insertion length: 165 mm, others on request
  • Diameter with shielding: 60 mm
  • Mounting flange: 4.5″ O.D./ CF 63
  • Bakeout temperature 200° C
  • Filament: cold cathode
  • Differential pumping (2x)
  • Emission current control
  • Gases: Argon, Xenon, O2, N2, H2

Options

  • Scan generator
  • Gas inlet valve
  • Regulated gas inlet valve
  • Imaging
Not all parameters can be reached simultaneously. Above specifications may change without notice.
Pictures / diagrams for reference only.