Ion Sources

//Ion Sources
Ion Sources 2017-03-31T17:18:20+00:00

Ion Sources for Cleaning, Sputtering and Space Simulation

 

  • Standard sputtering ion sources
  • Scannable fine focus ion sources
  • Electron discharge ion sources
  • Duoplasmatron ion sources
  • Proton sources
  • ECR ion source

Standard Sputtering Ion Sources

  • Ion beam energy up to 5 keV
  • Argon ion cleaning with adjustable energy and broad beam spot
  • Computer source control
Max. Energy Max. Beam Current Model Description
5 keV 10 μA » IG-5-C

Scannable Fine Focus Ion Source for sputtering, depth profiling and ISS

  • Ion beam energy up to 5 keV
  • Multiple ion species
  • Focused ion beam with scanning for depth profiling
  • Computer scanning package
  • Optional differential pumping for UHV operation
  • Computer source control
  • High brightness ion beam
  • Mass separator optional
  • Non-line of sight operation available
Max. Energy Max. Beam Current Model Description
5 keV 10 μA » IG-5-SC
5 keV » Duo-5-SC

Scannable Fine Focus Ion Source for sputtering, depth profiling and SIMS

  • Standard Energy up to 30 keV High intensity, high brightness fine focused ion beam
  • Multiple ion species
  • Differential pumping for UHV operation
  • Optional beam tilt for neutral rejection
  • Optional fine beam focus for scanning and microprobe operation
  • High brightness ion beam
  • Mass separator optional
  • Non-line of sight operation available
Max. Energy Model Description
30 keV » Duo-30-SC

Proton Source for space research

  • Pure proton beam in an energy range up to 100 keV
  • Optional magnetic sector mass filtering
  • Adjustable beam size and homogeneity
  • Differential pumping for UHV operation
  • Compact, modular design to be mounted as add-on source to vacuum chambers
  • Large spot size
Max. Energy Max. Beam Current Model Description
50 keV 1 μA » Pro-50-F
100 keV 1 μA » Pro-100-F